High quality crystalline MoS2 thin films obtained on Ni coated substrates: optimization of the post-annealing treatment
Identifieur interne : 000430 ( France/Analysis ); précédent : 000429; suivant : 000431High quality crystalline MoS2 thin films obtained on Ni coated substrates: optimization of the post-annealing treatment
Auteurs : E. Gourmelon [France] ; H. Hadouda [Algérie] ; Jc Bernede [France] ; J. Pouzet [France]Source :
- Vacuum [ 0042-207X ] ; 1997.
Descripteurs français
- Pascal (Inist)
English descriptors
- KwdEn :
Abstract
Textured MoS2 films can be obtained by solid state reaction between the constituents in thin film form when a thin Ni base layer is present. The crystallites have their c-axis perpendicular to the plane of the substrate. The better annealing conditions are T = 1123 K and t = 30 min. The films are nearly stoichiometric, they are p-type. It appears by XPS depth profiling that nickel is present all over the thickness of the MoS2 films. The high conductivity and photoconductivity of the films demonstrate the high crystalline quality of the films obtained. The crystallization process is discussed. It appears that the presence of liquid NiS phase alone cannot explain the improvement of the crystallization of the MoS2 thin films.
Url:
DOI: 10.1016/S0042-207X(97)00025-0
Affiliations:
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ISTEX:735EFDEE459DD0FA1A3C8A95FEA600CC67D992CELe document en format XML
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The crystallites have their c-axis perpendicular to the plane of the substrate. The better annealing conditions are T = 1123 K and t = 30 min. The films are nearly stoichiometric, they are p-type. It appears by XPS depth profiling that nickel is present all over the thickness of the MoS2 films. The high conductivity and photoconductivity of the films demonstrate the high crystalline quality of the films obtained. The crystallization process is discussed. It appears that the presence of liquid NiS phase alone cannot explain the improvement of the crystallization of the MoS2 thin films.</div></front></TEI><affiliations><list><country><li>Algérie</li><li>France</li></country><region><li>Pays de la Loire</li><li>Wilaya d'Oran</li></region><settlement><li>Nantes Cèdex 3</li><li>Oran</li></settlement></list><tree><country name="France"><region name="Pays de la Loire"><name sortKey="Gourmelon, E" sort="Gourmelon, E" uniqKey="Gourmelon E" first="E" last="Gourmelon">E. 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